Wrapping monitor Type LMS & Type AMS
This system monitors the frequency of wafer polishing in real time. The frequency trend graph is displayed and you can check whether polishing progresses normally. It consists of a commercially available PC + detector. LMS uses our network analyzer as a detector and AMS uses ALC – 2120 manufactured by Transat. Detection setting, polishing end condition etc, reciprocal setting of ALC – 2120 and network analyzer has been recipe, so it can be flexibly set without error.
basic specifications
| Detector |
LMS: HC-3701 |
|---|---|
| Frequency |
LMS: 1 to 180 MHz |
| Display accuracy |
LMS: – |
| Display size |
351 (W) x 201 (D) x 306 (H) mm |
| Body PC dimensions |
195.9 (W) x 395 (D) x 216.2 (H) mm |
| Input power supply |
AC 100 to 240 V 50/60 Hz |