Multi-point measurement system for round and square wafers up to 4 inches in size
Frequency sorting of round and square quartz wafers. The wafer measurement point can be programmed.
| Model |
3720 （For square wafers only） |
3750 （For round wafers only） |
|---|---|---|
| Available sizes |
2～3 inches |
2～4 inches |
| Measurement item |
・Wafer fundamental frequency |
|
| Measurement frequency |
10 to 60MHz |
|
| Measuring instrument |
Network analyzer R3755A（ADVANTEST） |
|
| Measurement accuracy |
100ppm (repeating of the same wafer 10 times) |
|
| processing power |
Average 10 seconds / measure（Including measurement time 140mS x 3 places） |
|
| Dimension |
1400(W) × 1500(D) × 1800(H)mm |
1870(W) × 885(D) × 1655(H)mm |
| Supply |
8 pcs carrier |
4 pcs carrier |
| Receipts |
30 pcs carrier |
10 pcs carrier |
| Classification |
Number of classifications: 30 ranks (including RI) |
Number of classifications: 10 ranks |
| Input power supply |
Three-phase AC 200 V 50/60 Hz |
AC200V 50/60Hz |
| Air Supply |
0.4 MPa (dry clean air) |
|